A TEM lamella of an SRAM was prepared using a FIB-SEM. The lamella was thinned down to a thickness of 50 nm and various STEM images were observed on the FIB-SEM equipped with a STEM detector. BF-STEM image shows the crystal structure of Poly-Si region and surrounding structures. MADDF-STEM image highlights the barrier metal around the W plug. HAADF-STEM image provides Z-contrast according to the average atomic number. Several nm thick gate oxide layer was clearly observed at higher magnification
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A TEM lamella of an SRAM was prepared using a FIB-SEM. The la…
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FIB-SEM Systems for High-Precision Imaging & Sample Preparation | Tescan
FIB-SEM Systems for High-Precision Imaging & Sample Preparation | T…
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Automated in-situ TEM sample preparation on a FIB-SEM #AutoMicrosampling #AutoThinning #Lamella #TEMSample #FIB #FIBSEM #electronmicroscopy #ElectronMicroscope For details, please see the description at https://www.youtube.com/watch?v=YFNL9w_7Rjk&list=PL26wsKAGp_QZwiY8L-FToKM2HTPq4AG23&index=75 | Hitachi Electron Microscope
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Automated in-situ TEM sample preparation on a FIB-SEM #AutoMi…
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FIB processes for TEM sample prep from microsample extraction out of bulk sample to lamella thinning and eventually Ar ion beam finishing were automated using a FIB-SEM-Ar Triple Beam system. After Auto-Microsampling (in-situ lift out) and auto-thinning processes, Ar ion beam was automatically irradiated to reduce FIB-induced damage to realize unattended TEM lamella preparation. #Cu #CrystalOrientation #EBSD #GrainBoundary #FIB #SEM #FIBSEM #electronmicroscopy #ElectronMicroscope Available instr
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FIB processes for TEM sample prep from microsample extraction out o…
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Introducing ZEISS Crossbeam 550 Samplefab! The FIB-SEM for fast, automated lamella prep for reliable TEM sample production. | ZEISS Microscopy | Facebook
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Introducing ZEISS Crossbeam 550 Samplefab! The FIB-SEM for fast, …
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Preparing TEM lamellae no longer needs to slow you down. Join our...
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Preparing TEM lamellae no longer needs to slow you down. Join our...
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